From yyao at snf.stanford.edu Mon Jan 7 12:52:23 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jan 7, 2002 12:52:23 PM Subject: Problem drytek2 2002-01-07 12:52:22: can't adjust reflected power lower than 40 for program 2 (Si Aniso Etch) Message-ID: From hphan at snf.stanford.edu Mon Jan 7 02:01:36 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 7, 2002 2:01:36 PM Subject: Problem drytek2 2002-01-07 12:52:22: Tuning Reflect Works Fine, Be Patient Message-ID: From cbaxter at snf.stanford.edu Tue Jan 8 06:25:06 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 8, 2002 6:25:06 PM Subject: Shutdown drytek2 2002-01-08 18:25:05: due for oil change Message-ID: From cbaxter at snf.stanford.edu Tue Jan 8 08:39:12 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 8, 2002 8:39:12 PM Subject: Shutdown drytek2 2002-01-08 18:25:05: due for oil change Message-ID: completed oil and filter change From yyao at snf.stanford.edu Thu Jan 10 10:45:11 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jan 10, 2002 10:45:11 PM Subject: Problem drytek2 2002-01-10 22:45:10: primer works now, but one of the display is off Message-ID: From yyao at snf.stanford.edu Thu Jan 10 10:48:27 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jan 10, 2002 10:48:27 PM Subject: Problem drytek2 2002-01-10 22:48:26: above message is for svgcoat, sorry. Message-ID: From cbaxter at snf.stanford.edu Thu Jan 10 11:08:44 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 10, 2002 11:08:44 PM Subject: Problem drytek2 2002-01-10 22:48:26: above message is for svgcoat, sorry. Message-ID: From cbaxter at snf.stanford.edu Thu Jan 10 11:08:52 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 10, 2002 11:08:52 PM Subject: Problem drytek2 2002-01-10 22:45:10: primer works now, but one of the display is off Message-ID: From evelyn at snf.stanford.edu Tue Jan 15 11:25:01 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Jan 15, 2002 11:25:01 AM Subject: Shutdown drytek2 2002-01-15 11:25:00: oxygen problem Message-ID: plasma is reddish From booth at snf.stanford.edu Tue Jan 15 03:21:36 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 15, 2002 3:21:36 PM Subject: Shutdown drytek2 2002-01-15 11:25:00: oxygen problem Message-ID: replaced flexible gas inlet line at top of loadling door. O2 plasma has blue color again. From narya at snf.stanford.edu Sun Jan 20 07:13:39 2002 From: narya at snf.stanford.edu (narya at snf.stanford.edu) Date: Jan 20, 2002 7:13:39 PM Subject: Problem drytek2 2002-01-20 19:13:38: wafer holding pins broken.. Message-ID: Slots 1(top) and 4 have back pins missing. Wafer could get sucked out if vacuum comes on .,.. From booth at snf.stanford.edu Tue Jan 22 07:21:15 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2002 7:21:15 AM Subject: Problem drytek2 2002-01-20 19:13:38: wafer holding pins broken.. Message-ID: replaced two teflon wafer pins. From uytingco at snf.stanford.edu Wed Jan 23 02:51:14 2002 From: uytingco at snf.stanford.edu (uytingco at snf.stanford.edu) Date: Jan 23, 2002 2:51:14 PM Subject: Comment drytek2 2002-01-23 14:51:09: laser end-pt detector Message-ID: i tried using the laser end-pt detection on drytek2 but it doesn't work From gyama at snf.stanford.edu Mon Jan 28 04:01:59 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jan 28, 2002 4:01:59 PM Subject: Problem drytek2 2002-01-28 16:01:57: no fwd power Message-ID: From cbaxter at snf.stanford.edu Mon Jan 28 05:31:38 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 28, 2002 5:31:38 PM Subject: Problem drytek2 2002-01-28 16:01:57: no fwd power Message-ID: manually tune match