Problem drytek2 2002-01-07 12:52:22: can't adjust reflected power lower than 40 for program 2 (Si Aniso Etch)
yyao at snf.stanford.edu
yyao at snf.stanford.edu
Mon Jan 7 12:52:23 PST 2002
Previous message:
Problem drytek2 2002-01-07 12:52:22: Tuning Reflect Works Fine, Be Patient
Next message:
Shutdown drytek2 2002-01-08 18:25:05: due for oil change
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
Previous message:
Problem drytek2 2002-01-07 12:52:22: Tuning Reflect Works Fine, Be Patient
Next message:
Shutdown drytek2 2002-01-08 18:25:05: due for oil change
Messages sorted by:
[ date ]
[ thread ]
[ subject ]
[ author ]
More information about the drytek2-pcs mailing list