Problem drytek2 2002-07-09 23:31:12: Possible contam. from glass, see below:
ericp at snf.stanford.edu
ericp at snf.stanford.edu
Tue Jul 9 11:31:14 PDT 2002
Date: Tue, 9 Jul 2002 21:54:35 -0700
From: Eaden Saw <eadensaw at hotmail.com>
To: drytek2 at snf.stanford.edu
Subject: The drytek2 has etched Si on pyrex wafers on 7/1 and 7/2 for 2
min each
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This is to inform you that the drytek2 has inadvently been used to etched
Si on pyrex wafers on 7/1 and 7/2. I am sorry for any inconcenience this
might have caused you.
Eaden
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