From harshal at snf.stanford.edu  Wed Jun  5 04:03:36 2002
From: harshal at snf.stanford.edu (harshal at snf.stanford.edu)
Date: Jun 5, 2002 4:03:36 PM
Subject: Problem drytek2 2002-06-05 16:03:35: machine button.
Message-ID: <mailman.250.1357938284.25682.drytek2-pcs@snf.stanford.edu>

the machine button light does not glow in standby condition, although the machine is in ON condition.



From cbaxter at snf.stanford.edu  Wed Jun  5 07:26:54 2002
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jun 5, 2002 7:26:54 PM
Subject: Problem drytek2 2002-06-05 16:03:35: machine button.
Message-ID: <mailman.251.1357938284.25682.drytek2-pcs@snf.stanford.edu>

change light bulb



From hphan at snf.stanford.edu  Fri Jun  7 04:28:54 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jun 7, 2002 4:28:54 PM
Subject: Problem drytek2 2002-06-07 16:28:53: Machine Light Buld Burn Out 
Message-ID: <mailman.252.1357938284.25682.drytek2-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Fri Jun  7 04:48:43 2002
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jun 7, 2002 4:48:43 PM
Subject: Problem drytek2 2002-06-07 16:48:41: Horrible Sound came from chamber
Message-ID: <mailman.253.1357938284.25682.drytek2-pcs@snf.stanford.edu>

A big sound came out from chamber during loading the wafer.
Unknown problem. I have ran couple processes, and the 
system looks fine with me.



From booth at snf.stanford.edu  Mon Jun 10 07:21:25 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 10, 2002 7:21:25 AM
Subject: Problem drytek2 2002-06-07 16:48:41: Horrible Sound came from chamber
Message-ID: <mailman.254.1357938284.25682.drytek2-pcs@snf.stanford.edu>

checked out OK this morning.



From booth at snf.stanford.edu  Mon Jun 10 07:21:35 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jun 10, 2002 7:21:35 AM
Subject: Problem drytek2 2002-06-07 16:28:53: Machine Light Buld Burn Out 
Message-ID: <mailman.255.1357938284.25682.drytek2-pcs@snf.stanford.edu>

replaced bulb



From eadens at snf.stanford.edu  Sun Jun 30 10:46:22 2002
From: eadens at snf.stanford.edu (eadens at snf.stanford.edu)
Date: Jun 30, 2002 10:46:22 PM
Subject: Shutdown drytek2 2002-06-30 22:46:21: DRYTEK2 doesn't pump down
Message-ID: <mailman.256.1357938284.25682.drytek2-pcs@snf.stanford.edu>

Drytek2 can not complete a cycle.  It canot not pump down at the start of the cycle and thus the gas flow and RF can not kick in.