Problem drytek2 2002-06-07 16:48:41: Horrible Sound came from chamber

hphan at snf.stanford.edu hphan at snf.stanford.edu
Fri Jun 7 04:48:43 PDT 2002


A big sound came out from chamber during loading the wafer.
Unknown problem. I have ran couple processes, and the 
system looks fine with me.




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