From sams at snf.stanford.edu Sun Nov 3 06:10:29 2002 From: sams at snf.stanford.edu (sams at snf.stanford.edu) Date: Nov 3, 2002 6:10:29 PM Subject: Problem drytek2 2002-11-03 18:10:28: Cooling Water Off Message-ID: There is no cooling water From hphan at snf.stanford.edu Mon Nov 4 09:44:16 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 4, 2002 9:44:16 AM Subject: Shutdown drytek2 2002-11-04 09:44:15: No cooling water Message-ID: From cbaxter at snf.stanford.edu Mon Nov 4 05:03:15 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 4, 2002 5:03:15 PM Subject: Shutdown drytek2 2002-11-04 09:44:15: No cooling water Message-ID: changed fuse holder From cbaxter at snf.stanford.edu Mon Nov 4 05:03:22 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 4, 2002 5:03:22 PM Subject: Problem drytek2 2002-11-03 18:10:28: Cooling Water Off Message-ID: From qtang at snf.stanford.edu Tue Nov 12 06:43:55 2002 From: qtang at snf.stanford.edu (qtang at snf.stanford.edu) Date: Nov 12, 2002 6:43:55 PM Subject: Problem drytek2 2002-11-12 18:43:54: RF power switch contact not good Message-ID: the RF power switch come off by itself. But the second try was OK. So maybe the switch contact is not good. From cbaxter at snf.stanford.edu Tue Nov 12 07:37:53 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 12, 2002 7:37:53 PM Subject: Problem drytek2 2002-11-12 18:43:54: RF power switch contact not good Message-ID: I ran o2 plasma, it worked fine From mbartsch at snf.stanford.edu Sat Nov 16 11:05:17 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Nov 16, 2002 11:05:17 AM Subject: Problem drytek2 2002-11-16 11:05:16: slow initial pumpdown Message-ID: From hphan at snf.stanford.edu Mon Nov 18 09:52:21 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 9:52:21 AM Subject: Problem drytek2 2002-11-16 11:05:16: Ran a process, it works fine. Message-ID: From mbartsch at snf.stanford.edu Mon Nov 18 12:45:58 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Nov 18, 2002 12:45:58 PM Subject: Problem drytek2 2002-11-18 12:45:57: Pumpdown problems Message-ID: Starting a run after the chamber has been vented to atmosphere, it seems to take a very long time for the system to reach its ininitial base pressure. Usually this means you hit Start and it sits there trying to pumpdown...not flowing any gases. If you micro reset once in this condition, then start again the program will usually run correctly. Strange... From hphan at snf.stanford.edu Wed Nov 20 09:28:47 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 20, 2002 9:28:47 AM Subject: Problem drytek2 2002-11-18 12:45:57: Pump Down ok!! Message-ID: From kjliu at snf.stanford.edu Wed Nov 20 06:43:59 2002 From: kjliu at snf.stanford.edu (kjliu at snf.stanford.edu) Date: Nov 20, 2002 6:43:59 PM Subject: Problem drytek2 2002-11-20 18:43:58: slow pump down and irregular flow control Message-ID: Chamber pump down is very slow. Gas flow rates can fluctuate wildly sometimes between 50-250 sccm by itself. From cbaxter at snf.stanford.edu Thu Nov 21 07:14:29 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 21, 2002 7:14:29 PM Subject: Shutdown drytek2 2002-11-21 19:14:28: routin maint. Message-ID: From cbaxter at snf.stanford.edu Thu Nov 21 09:01:15 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 21, 2002 9:01:15 PM Subject: Shutdown drytek2 2002-11-21 19:14:28: routin maint. Message-ID: routin maint. completed From cbaxter at snf.stanford.edu Thu Nov 21 09:01:22 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 21, 2002 9:01:22 PM Subject: Problem drytek2 2002-11-20 18:43:58: slow pump down and irregular flow control Message-ID: From mbartsch at snf.stanford.edu Fri Nov 22 01:41:47 2002 From: mbartsch at snf.stanford.edu (mbartsch at snf.stanford.edu) Date: Nov 22, 2002 1:41:47 AM Subject: Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem? Message-ID: Running O2 plasma (should be dark blue) I get instead bright pink plasma. Last time this meant air rather than O2 in the chamber. Nitride etch seems to be okay...plasma is the expected white/pale blue color. Trying O2 on process 3 still produces pink. Maybe the O2 cylinder is empty...? Flow rate looks okay though. Leak in the line? Weird. From hector at snf.stanford.edu Fri Nov 22 04:56:24 2002 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Nov 22, 2002 4:56:24 AM Subject: Problem drytek2 2002-11-22 04:56:23: plasma has wrong chemistry Message-ID: From booth at snf.stanford.edu Fri Nov 22 07:25:20 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 22, 2002 7:25:20 AM Subject: Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber Message-ID: From booth at snf.stanford.edu Fri Nov 22 07:26:00 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 22, 2002 7:26:00 AM Subject: Problem drytek2 2002-11-22 04:56:23: plasma has wrong chemistry Message-ID: shutdown From booth at snf.stanford.edu Fri Nov 22 07:26:14 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 22, 2002 7:26:14 AM Subject: Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem? Message-ID: shutdown From booth at snf.stanford.edu Fri Nov 22 10:51:45 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 22, 2002 10:51:45 AM Subject: Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber Message-ID: replaced leaking bellows.