Problem drytek2 2002-11-18 12:45:57: Pumpdown problems

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Mon Nov 18 12:45:58 PST 2002


Starting a run after the chamber has been vented to atmosphere, it seems to take a very long time for the system to reach its ininitial base pressure.  Usually this means you hit Start and it sits there trying to pumpdown...not flowing any gases.  If you micro reset once in this condition, then start again the program will usually run correctly.  Strange...




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