Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem?

mbartsch at mbartsch at
Fri Nov 22 01:41:47 PST 2002

Running O2 plasma (should be dark blue) I get instead bright pink plasma.  Last time this meant air rather than O2 in the chamber.  Nitride etch seems to be okay...plasma is the expected white/pale blue color.  Trying O2 on process 3 still produces pink.  Maybe the O2 cylinder is empty...?  Flow rate looks okay though.  Leak in the line?  Weird.

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