Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem?

mbartsch at snf.stanford.edu mbartsch at snf.stanford.edu
Fri Nov 22 01:41:47 PST 2002


Running O2 plasma (should be dark blue) I get instead bright pink plasma.  Last time this meant air rather than O2 in the chamber.  Nitride etch seems to be okay...plasma is the expected white/pale blue color.  Trying O2 on process 3 still produces pink.  Maybe the O2 cylinder is empty...?  Flow rate looks okay though.  Leak in the line?  Weird.




More information about the drytek2-pcs mailing list