Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Nov 22 10:51:45 PST 2002
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Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber
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replaced leaking bellows.
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Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber
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