November 2002 Archives by subject

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Starting: Sun Nov 3 06:10:29 PST 2002
Ending: Fri Nov 22 10:51:45 PST 2002
Messages: 20

• Problem drytek2 2002-11-03 18:10:28: Cooling Water Off   sams at snf.stanford.edu
• Problem drytek2 2002-11-03 18:10:28: Cooling Water Off   cbaxter at snf.stanford.edu
• Problem drytek2 2002-11-12 18:43:54: RF power switch contact not good   qtang at snf.stanford.edu
• Problem drytek2 2002-11-12 18:43:54: RF power switch contact not good   cbaxter at snf.stanford.edu
• Problem drytek2 2002-11-16 11:05:16: Ran a process, it works fine.   hphan at snf.stanford.edu
• Problem drytek2 2002-11-16 11:05:16: slow initial pumpdown   mbartsch at snf.stanford.edu
• Problem drytek2 2002-11-18 12:45:57: Pump Down ok!!   hphan at snf.stanford.edu
• Problem drytek2 2002-11-18 12:45:57: Pumpdown problems   mbartsch at snf.stanford.edu
• Problem drytek2 2002-11-20 18:43:58: slow pump down and irregular flow control   kjliu at snf.stanford.edu
• Problem drytek2 2002-11-20 18:43:58: slow pump down and irregular flow control   cbaxter at snf.stanford.edu
• Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem?   mbartsch at snf.stanford.edu
• Problem drytek2 2002-11-22 01:41:46: Oxygen plasma problem?   booth at snf.stanford.edu
• Problem drytek2 2002-11-22 04:56:23: plasma has wrong chemistry   hector at snf.stanford.edu
• Problem drytek2 2002-11-22 04:56:23: plasma has wrong chemistry   booth at snf.stanford.edu
• Shutdown drytek2 2002-11-04 09:44:15: No cooling water   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-11-04 09:44:15: No cooling water   hphan at snf.stanford.edu
• Shutdown drytek2 2002-11-21 19:14:28: routin maint.   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-11-21 19:14:28: routin maint.   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber   booth at snf.stanford.edu
• Shutdown drytek2 2002-11-22 07:25:20: air leak into etch chamber   booth at snf.stanford.edu

Last message date: Fri Nov 22 10:51:45 PST 2002
Archived on: Fri Jan 11 13:05:02 PST 2013

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