From mcvittie at snf.stanford.edu Fri Sep 6 05:53:27 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 6, 2002 5:53:27 PM Subject: Comment drytek2 2002-09-06 17:53:26: Drytek2: Fixed Laser Endpoint Message-ID: Realigned laser so that endpoint system now works. Apparently, the electrode stack has been moved. The laser target area has shifted about one cm toward the front right from wafer center. I made up a target wafer marking `s show where the new target is. Jim From mcvittie at snf.stanford.edu Fri Sep 6 06:01:05 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 6, 2002 6:01:05 PM Subject: Problem drytek2 2002-09-06 18:01:04: Non-uniform etch rate; slowest at back right Message-ID: Measured poly etch rate uniformity of top wafer by stopping right at endpoint. Found that back right was etching more than 17% slower than front left. This may because of water leak. On second electrode there appears to be corrosion at the back right of the electrode from a water leak. Jim From haniff at snf.stanford.edu Mon Sep 9 09:30:44 2002 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Sep 9, 2002 9:30:44 PM Subject: Problem drytek2 2002-09-09 21:30:43: laser on Message-ID: laser is on, I have never seen it on before From cbaxter at snf.stanford.edu Mon Sep 9 10:34:55 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 9, 2002 10:34:55 PM Subject: Problem drytek2 2002-09-09 21:30:43: laser on Message-ID: laser is for endpoint use From cbaxter at snf.stanford.edu Wed Sep 11 04:24:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 11, 2002 4:24:09 PM Subject: Shutdown drytek2 2002-09-11 16:24:06: need to look for water leak inside the chamber Message-ID: From cbaxter at snf.stanford.edu Wed Sep 11 09:21:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 11, 2002 9:21:09 PM Subject: Shutdown drytek2 2002-09-11 16:24:06: need to look for water leak inside the chamber Message-ID: lower electrode and change all 12 viton oring on 1/4 stainless steel water path. From cbaxter at snf.stanford.edu Wed Sep 11 09:21:20 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 11, 2002 9:21:20 PM Subject: Problem drytek2 2002-09-06 18:01:04: Non-uniform etch rate; slowest at back right Message-ID: From hector at snf.stanford.edu Wed Sep 18 03:37:07 2002 From: hector at snf.stanford.edu (hector at snf.stanford.edu) Date: Sep 18, 2002 3:37:07 PM Subject: Problem drytek2 2002-09-18 15:37:07: electrodes too hot; no cooling water Message-ID: From lindaw at snf.stanford.edu Wed Sep 18 03:56:43 2002 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sep 18, 2002 3:56:43 PM Subject: Comment drytek2 2002-09-18 15:56:42: cooling water flow meter normal Message-ID: From cbaxter at snf.stanford.edu Wed Sep 18 04:13:07 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 18, 2002 4:13:07 PM Subject: Problem drytek2 2002-09-18 15:37:07: electrodes too hot; no cooling water Message-ID: chiller shut off, turn it back on From cbaxter at snf.stanford.edu Thu Sep 19 08:34:22 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 19, 2002 8:34:22 PM Subject: Shutdown drytek2 2002-09-19 20:34:21: due for oil change Message-ID: From cbaxter at snf.stanford.edu Thu Sep 19 09:44:37 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 19, 2002 9:44:37 PM Subject: Shutdown drytek2 2002-09-19 20:34:21: due for oil change Message-ID: oil and filters changed completed From aaronp at snf.stanford.edu Fri Sep 20 11:51:40 2002 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Sep 20, 2002 11:51:40 AM Subject: Shutdown drytek2 2002-09-20 11:51:38: no electrical power, was fine, now not Message-ID: From booth at snf.stanford.edu Fri Sep 20 01:09:56 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 20, 2002 1:09:56 PM Subject: Shutdown drytek2 2002-09-20 11:51:38: no electrical power, was fine, now not Message-ID: re-started system electronics, looks OK. Could have been power glitch? From sjain at snf.stanford.edu Fri Sep 20 05:37:01 2002 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Sep 20, 2002 5:37:01 PM Subject: Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min Message-ID: Hi, Jim McVittee and myself found a leak rate of 180mtorr/min onn the tool. We calculate that to correspond to a ~6sccm leak rate. As a result of the leak, I see a 1 minute delay in the etching iin an isotropic Si etch program (CF4 and O2). Sameer From cbaxter at snf.stanford.edu Fri Sep 20 06:40:03 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 20, 2002 6:40:03 PM Subject: Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min Message-ID: i let found down of 30 mins and leak check it again. leak is at <40m/t. if freon is just introduce in the chamber it will take awhile to pump out from the chamber. From seoung at snf.stanford.edu Sun Sep 22 12:07:36 2002 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Sep 22, 2002 12:07:36 AM Subject: Problem drytek2 2002-09-22 00:07:35: Low cooling water flow Message-ID: From sjain at snf.stanford.edu Sun Sep 22 05:58:56 2002 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: Sep 22, 2002 5:58:56 PM Subject: Problem drytek2 2002-09-22 17:58:55: rf power LIGHT not working Message-ID: From booth at snf.stanford.edu Mon Sep 23 07:38:33 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 23, 2002 7:38:33 AM Subject: Problem drytek2 2002-09-22 17:58:55: rf power LIGHT not working Message-ID: installed new RF power indicator bulb. From hphan at snf.stanford.edu Mon Sep 23 04:27:14 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Sep 23, 2002 4:27:14 PM Subject: Problem drytek2 2002-09-23 16:27:13: It took a while to pump down Message-ID: From cbaxter at snf.stanford.edu Mon Sep 23 07:06:32 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 23, 2002 7:06:32 PM Subject: Shutdown drytek2 2002-09-23 19:06:31: shutdown for 1hr plushing heat exchanger Message-ID: From cbaxter at snf.stanford.edu Mon Sep 23 08:05:57 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 23, 2002 8:05:57 PM Subject: Shutdown drytek2 2002-09-23 19:06:31: shutdown for 1hr plushing heat exchanger Message-ID: flushed heat exchanger From booth at snf.stanford.edu Tue Sep 24 07:49:53 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 24, 2002 7:49:53 AM Subject: Problem drytek2 2002-09-22 00:07:35: Low cooling water flow Message-ID: Cesar flushed cooling water in chiller. From booth at snf.stanford.edu Tue Sep 24 07:50:34 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 24, 2002 7:50:34 AM Subject: Problem drytek2 2002-09-23 16:27:13: It took a while to pump down Message-ID: maintenance scheduled Wed nite & Thursday. From cbaxter at snf.stanford.edu Wed Sep 25 04:54:14 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2002 4:54:14 PM Subject: Shutdown drytek2 2002-09-25 16:54:13: tool is schedule shutdown. to look for water and vacuum leak Message-ID: From mcvittie at snf.stanford.edu Fri Sep 27 06:40:19 2002 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 27, 2002 6:40:19 PM Subject: Shutdown drytek2 2002-09-25 16:54:13: Drytek2 Leak Repaired, ER uniformity< 1% Message-ID: Drytek2 Users, Several in chamber water leaks were repaired, chamber was seasoned for 1 hr with poly etch process and uniform ER test was performed at top wafer position. Using 5 pt measurement (center and 1 cm from edges), etch rate (ER) was found to be 1611 +/- 13 A/min. Next week, I will work with Henry to minimizethe electrode to electrode non-uniformity. Many thanks to Len and Cesar for repairing the leaks. Jim McVittie From yoshh at snf.stanford.edu Fri Sep 27 10:31:27 2002 From: yoshh at snf.stanford.edu (yoshh at snf.stanford.edu) Date: Sep 27, 2002 10:31:27 PM Subject: Problem drytek2 2002-09-27 22:31:26: slow pumping down Message-ID: it's taking forever to pump down... From cbaxter at snf.stanford.edu Mon Sep 30 05:46:32 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 30, 2002 5:46:32 PM Subject: Problem drytek2 2002-09-27 22:31:26: slow pumping down Message-ID: tighten screws on door and add oil on blower. now chamber base with 60sec