Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min

sjain at snf.stanford.edu sjain at snf.stanford.edu
Fri Sep 20 05:37:01 PDT 2002


Hi,
    Jim McVittee and myself found a leak rate of 180mtorr/min onn the tool. We calculate that to correspond to a ~6sccm leak rate.  As a result of the leak, I see a 1 minute delay in the etching iin an isotropic Si etch program (CF4 and O2).
Sameer




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