Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min

cbaxter at cbaxter at
Fri Sep 20 06:40:03 PDT 2002

i let found down of 30 mins and leak check it again. leak
is at <40m/t. if freon is just introduce in the chamber it will
take awhile to pump out from the chamber. 

More information about the drytek2-pcs mailing list