Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Sep 20 06:40:03 PDT 2002


i let found down of 30 mins and leak check it again. leak
is at <40m/t. if freon is just introduce in the chamber it will
take awhile to pump out from the chamber. 




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