September 2002 Archives by date

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Starting: Fri Sep 6 05:53:27 PDT 2002
Ending: Mon Sep 30 05:46:32 PDT 2002
Messages: 28

• Comment drytek2 2002-09-06 17:53:26: Drytek2: Fixed Laser Endpoint   mcvittie at snf.stanford.edu
• Problem drytek2 2002-09-06 18:01:04: Non-uniform etch rate; slowest at back right   mcvittie at snf.stanford.edu
• Problem drytek2 2002-09-09 21:30:43: laser on   haniff at snf.stanford.edu
• Problem drytek2 2002-09-09 21:30:43: laser on   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-11 16:24:06: need to look for water leak inside the chamber   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-11 16:24:06: need to look for water leak inside the chamber   cbaxter at snf.stanford.edu
• Problem drytek2 2002-09-06 18:01:04: Non-uniform etch rate; slowest at back right   cbaxter at snf.stanford.edu
• Problem drytek2 2002-09-18 15:37:07: electrodes too hot; no cooling water   hector at snf.stanford.edu
• Comment drytek2 2002-09-18 15:56:42: cooling water flow meter normal   lindaw at snf.stanford.edu
• Problem drytek2 2002-09-18 15:37:07: electrodes too hot; no cooling water   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-19 20:34:21: due for oil change   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-19 20:34:21: due for oil change   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-20 11:51:38: no electrical power, was fine, now not   booth at snf.stanford.edu
• Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min   sjain at snf.stanford.edu
• Problem drytek2 2002-09-20 17:37:00: leak rateof 180mtorr/min   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-20 11:51:38: no electrical power, was fine, now not   aaronp at snf.stanford.edu
• Problem drytek2 2002-09-22 17:58:55: rf power LIGHT not working   sjain at snf.stanford.edu
• Problem drytek2 2002-09-22 00:07:35: Low cooling water flow   seoung at snf.stanford.edu
• Problem drytek2 2002-09-23 16:27:13: It took a while to pump down   hphan at snf.stanford.edu
• Shutdown drytek2 2002-09-23 19:06:31: shutdown for 1hr plushing heat exchanger   cbaxter at snf.stanford.edu
• Problem drytek2 2002-09-22 17:58:55: rf power LIGHT not working   booth at snf.stanford.edu
• Shutdown drytek2 2002-09-23 19:06:31: shutdown for 1hr plushing heat exchanger   cbaxter at snf.stanford.edu
• Problem drytek2 2002-09-22 00:07:35: Low cooling water flow   booth at snf.stanford.edu
• Problem drytek2 2002-09-23 16:27:13: It took a while to pump down   booth at snf.stanford.edu
• Shutdown drytek2 2002-09-25 16:54:13: tool is schedule shutdown. to look for water and vacuum leak   cbaxter at snf.stanford.edu
• Shutdown drytek2 2002-09-25 16:54:13: Drytek2 Leak Repaired, ER uniformity< 1%   mcvittie at snf.stanford.edu
• Problem drytek2 2002-09-27 22:31:26: slow pumping down   yoshh at snf.stanford.edu
• Problem drytek2 2002-09-27 22:31:26: slow pumping down   cbaxter at snf.stanford.edu

Last message date: Mon Sep 30 05:46:32 PDT 2002
Archived on: Fri Jan 11 13:05:01 PST 2013

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