From hanjun at snf.stanford.edu Tue Apr 1 05:20:30 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Apr 1, 2003 5:20:30 PM Subject: Problem drytek2 2003-04-01 17:20:29: Proc 1 - high refl. power/ no plasma turned on Message-ID: From hanjun at snf.stanford.edu Tue Apr 1 05:33:24 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Apr 1, 2003 5:33:24 PM Subject: Shutdown drytek2 2003-04-01 17:33:23: RF failure Message-ID: I was trying to use "isotropic Si etch" program with process 1. There was no RF plasma turned on, but only power values were displayed. The reflected power value was displayed very high. (forward=300/reflected=200) The situation was the same for process 1 "contact clean". From cbaxter at snf.stanford.edu Tue Apr 1 07:58:23 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 1, 2003 7:58:23 PM Subject: Shutdown drytek2 2003-04-01 17:33:23: Report Clear for drytek2 Message-ID: fine tune match From cbaxter at snf.stanford.edu Tue Apr 1 07:58:40 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 1, 2003 7:58:40 PM Subject: Problem drytek2 2003-04-01 17:20:29: Report Clear for drytek2 Message-ID: fine tuned match From cbaxter at snf.stanford.edu Mon Apr 28 05:33:17 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 28, 2003 5:33:17 PM Subject: Shutdown drytek2 2003-04-28 17:33:16: Report Shutdown for drytek2 Message-ID: routin maint. From cbaxter at snf.stanford.edu Mon Apr 28 08:13:56 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 28, 2003 8:13:56 PM Subject: Shutdown drytek2 2003-04-28 17:33:16: Report Clear for drytek2 Message-ID: completed oil,filter and demister changed