From zappe at snf.stanford.edu Wed Aug 6 10:11:03 2003 From: zappe at snf.stanford.edu (zappe at snf.stanford.edu) Date: Aug 6, 2003 10:11:03 PM Subject: Problem drytek2 2003-08-06 22:11:02: Proc.3: Reflected Power too high Message-ID: I wasn't able to adjust the reflected power on process 3. Switched to process 2. From cbaxter at snf.stanford.edu Thu Aug 7 10:33:23 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 7, 2003 10:33:23 AM Subject: Problem drytek2 2003-08-06 22:11:02: Report Clear for drytek2 Message-ID: was able to tuned fine with o2 plasma From booth at snf.stanford.edu Thu Aug 14 08:04:15 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 14, 2003 8:04:15 AM Subject: Shutdown drytek2 2003-08-14 08:04:14: Report Shutdown for drytek2 Message-ID: maintenance in progress. From booth at snf.stanford.edu Thu Aug 14 10:59:00 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 14, 2003 10:59:00 AM Subject: Shutdown drytek2 2003-08-14 08:04:14: Report Clear for drytek2 Message-ID: finished for today. From mattlin at snf.stanford.edu Thu Aug 14 06:12:17 2003 From: mattlin at snf.stanford.edu (mattlin at snf.stanford.edu) Date: Aug 14, 2003 6:12:17 PM Subject: Problem drytek2 2003-08-14 18:12:13: Report Problem for drytek2 Message-ID: red light for RF power does not work. From cbaxter at snf.stanford.edu Fri Aug 15 09:24:52 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 15, 2003 9:24:52 AM Subject: Problem drytek2 2003-08-14 18:12:13: Report Clear for drytek2 Message-ID: changed neon bulb From bob101 at snf.stanford.edu Sat Aug 16 11:29:53 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: Aug 16, 2003 11:29:53 PM Subject: Problem drytek2 2003-08-16 23:29:52: Report Problem for drytek2 Message-ID: before I enable dryteck2, no presure number displayed. I try to use it. But it can not pump down. From afreeman at snf.stanford.edu Sun Aug 17 12:00:35 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Aug 17, 2003 12:00:35 AM Subject: Problem drytek2 2003-08-17 00:00:34: Report Problem for drytek2 Message-ID: no flow in 3, no pressure signal, pump does not come on From cbaxter at snf.stanford.edu Mon Aug 18 06:30:56 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 18, 2003 6:30:56 AM Subject: Problem drytek2 2003-08-17 00:00:34: Report Clear for drytek2 Message-ID: isolation valve stuck open. manually open/close. working normal From cbaxter at snf.stanford.edu Mon Aug 18 06:31:03 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 18, 2003 6:31:03 AM Subject: Problem drytek2 2003-08-16 23:29:52: Report Clear for drytek2 Message-ID: From booth at snf.stanford.edu Tue Aug 19 07:21:54 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 19, 2003 7:21:54 AM Subject: Shutdown drytek2 2003-08-19 07:21:53: Report Shutdown for drytek2 Message-ID: From booth at snf.stanford.edu Tue Aug 19 11:31:33 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 19, 2003 11:31:33 AM Subject: Shutdown drytek2 2003-08-19 07:21:53: Report Clear for drytek2 Message-ID: finished maintenance for today. From xzhuan1 at snf.stanford.edu Wed Aug 27 02:39:47 2003 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Aug 27, 2003 2:39:47 PM Subject: Problem drytek2 2003-08-27 14:39:46: Report Problem for drytek2 Message-ID: timer 2 stopped at 2 min when set to 7 min From cbaxter at snf.stanford.edu Wed Aug 27 04:40:05 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 27, 2003 4:40:05 PM Subject: Problem drytek2 2003-08-27 14:39:46: Report Clear for drytek2 Message-ID: thumb wheel was not set right. run a 5 mins and 7 mins time recipe without a problem