From shao at snf.stanford.edu Wed Feb 19 11:18:38 2003 From: shao at snf.stanford.edu (shao at snf.stanford.edu) Date: Feb 19, 2003 11:18:38 AM Subject: Problem drytek2 2003-02-19 11:18:38: standby pressure is 22 Message-ID: From latta at snf.stanford.edu Wed Feb 19 12:16:20 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 19, 2003 12:16:20 PM Subject: Problem drytek2 2003-02-19 11:18:38: standby pressure is 22 Message-ID: User did not push Cycle Start when trying to get etcher into standby. From hphan at snf.stanford.edu Thu Feb 20 16:55:48 2003 From: hphan at snf.stanford.edu (Henry Phan) Date: Thu, 20 Feb 2003 16:55:48 -0800 Subject: Testing Message-ID: <3E557914.852068B3@snf.stanford.edu> -- Henry _ _ _ _ Henry Q. Phan Stanford Nanofabrication Facility CIS Room 146, Mail Code 4070 Stanford, CA 94305 (650)725-3659 hphan at snf.stanford.edu From mcconnel at snf.stanford.edu Fri Feb 21 11:32:07 2003 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: Feb 21, 2003 11:32:07 AM Subject: Problem drytek2 2003-02-21 11:32:06: blower light burnt out Message-ID: The light bulb in the "blower" button on the lower panel of the machine has burnt out. Henry took a look at the machine, and it seems to be properly functioning, indicating just a burnt out bulb. From cbaxter at snf.stanford.edu Fri Feb 21 05:04:02 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 21, 2003 5:04:02 PM Subject: Problem drytek2 2003-02-21 11:32:06: blower light burnt out Message-ID: changed light bulb From bob101 at snf.stanford.edu Sun Feb 23 09:08:53 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: Feb 23, 2003 9:08:53 PM Subject: Problem drytek2 2003-02-23 21:08:52: the blower button is off. Message-ID: From booth at snf.stanford.edu Mon Feb 24 07:28:26 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 24, 2003 7:28:26 AM Subject: Problem drytek2 2003-02-23 21:08:52: the blower button is off. Message-ID: pushbutton for blower ON had incorrect bulb installed - it broke & melted the button housing. Installed new button with correct #387 bulb. Works normally again. From bob101 at snf.stanford.edu Mon Feb 24 09:02:35 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: Feb 24, 2003 9:02:35 PM Subject: Problem drytek2 2003-02-24 21:02:34: small not good when chamber open Message-ID: From cbaxter at snf.stanford.edu Mon Feb 24 09:15:10 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 24, 2003 9:15:10 PM Subject: Problem drytek2 2003-02-24 21:02:34: small not good when chamber open Message-ID: I ran 10 mins cf4 and o2 recipe and smell was normal and was not strong. I also leak check chamber its less than 10mt From beckwith at cis.Stanford.EDU Tue Feb 25 12:05:53 2003 From: beckwith at cis.Stanford.EDU (beckwith at cis.Stanford.EDU) Date: Tue, 25 Feb 2003 12:05:53 -0800 (PST) Subject: Problem drytek2 2003-02-24 21:02:34: small not good when chamber open In-Reply-To: <20030225050235.374064E4FC@cis.Stanford.EDU> Message-ID: If you find the smell too overwhelming for you, run one of the O2 programs for about 10 minutes. This usually cleans things up. The sulfur smell was bad enough a few days ago I could smell it while I was at the amt whenever the drytek2 door was opened! From cbaxter at snf.stanford.edu Wed Feb 26 04:28:48 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 26, 2003 4:28:48 PM Subject: Shutdown drytek2 2003-02-26 16:28:47: Report Shutdown for drytek2 Message-ID: shutdown for routin maint. From cbaxter at snf.stanford.edu Wed Feb 26 06:12:59 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 26, 2003 6:12:59 PM Subject: Shutdown drytek2 2003-02-26 16:28:47: Report Clear for drytek2 Message-ID: completed oil and filters changed