Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 31 01:25:16 PST 2003
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Shutdown drytek2 2003-01-30 10:57:10: SF6 bottle change.
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Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.
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