Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Jan 31 02:03:52 PST 2003
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Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.
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Problem drytek2 2003-01-31 12:50:49: Leak?? orange O2 Plasma glow
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replaced leaking tubing.
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Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.
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Problem drytek2 2003-01-31 12:50:49: Leak?? orange O2 Plasma glow
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