January 2003 Archives by author

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Starting: Mon Jan 13 03:59:53 PST 2003
Ending: Fri Jan 31 12:50:50 PST 2003
Messages: 11

• Shutdown drytek2 2002-12-18 06:27:18: Shutdown for maint. & upgrade   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-13 16:00:22: Shutdown for Process testing   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-30 10:57:10: SF6 bottle change.   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-30 10:57:10: SF6 bottle change.   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.   booth at snf.stanford.edu
• Problem drytek2 2003-01-31 12:50:49: Leak?? orange O2 Plasma glow   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-31 13:25:14: air leak into etch chamber.   booth at snf.stanford.edu
• Shutdown drytek2 2003-01-29 17:11:12: due for oil change..   cbaxter at snf.stanford.edu
• Shutdown drytek2 2003-01-29 17:11:12: due for oil change..   cbaxter at snf.stanford.edu
• Shutdown drytek2 2003-01-13 16:00:22: Finished initial test of modified Drytek2   mcvittie at snf.stanford.edu
• Problem drytek2 2003-01-31 12:50:49: Leak?? orange O2 Plasma glow   mislam at snf.stanford.edu

Last message date: Fri Jan 31 12:50:50 PST 2003
Archived on: Fri Jan 11 13:05:02 PST 2013

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