From beckwith at snf.stanford.edu  Tue Jul 15 04:31:53 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jul 15, 2003 4:31:53 PM
Subject: Problem drytek2 2003-07-15 16:31:52: Report Problem for drytek2
Message-ID: <mailman.392.1357938285.25682.drytek2-pcs@snf.stanford.edu>

O2 on process1 does not seem to work. I gave up and
used process2. I think other people are running their )2
processes on process2, also, since it was already set up
for O2 when I arrived at the machine.



From booth at snf.stanford.edu  Wed Jul 16 01:47:29 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 16, 2003 1:47:29 PM
Subject: Problem drytek2 2003-07-15 16:31:52: Report Clear for drytek2
Message-ID: <mailman.393.1357938285.25682.drytek2-pcs@snf.stanford.edu>

replaced blown-up CRL capacitor in tuning
network.
Ran O2 process & tuned <20W reflected.



From cbaxter at snf.stanford.edu  Thu Jul 24 11:11:10 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 24, 2003 11:11:10 AM
Subject: Shutdown drytek2 2003-07-24 11:11:09: Report Shutdown for drytek2
Message-ID: <mailman.394.1357938285.25682.drytek2-pcs@snf.stanford.edu>

chiller not cooling down to temp. set point



From cbaxter at snf.stanford.edu  Thu Jul 24 11:16:19 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 24, 2003 11:16:19 AM
Subject: Shutdown drytek2 2003-07-24 11:11:09: Report Clear for drytek2
Message-ID: <mailman.395.1357938285.25682.drytek2-pcs@snf.stanford.edu>

sorry ,tool is ok to use



From hphan at snf.stanford.edu  Thu Jul 24 03:11:54 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jul 24, 2003 3:11:54 PM
Subject: Shutdown drytek2 2003-07-24 15:11:53: Report Shutdown for drytek2
Message-ID: <mailman.396.1357938285.25682.drytek2-pcs@snf.stanford.edu>

Maintenance service



From cbaxter at snf.stanford.edu  Thu Jul 24 04:31:20 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 24, 2003 4:31:20 PM
Subject: Shutdown drytek2 2003-07-24 15:11:53: Report Clear for drytek2
Message-ID: <mailman.397.1357938285.25682.drytek2-pcs@snf.stanford.edu>

completed oil and filters chnaged



From beckwith at snf.stanford.edu  Thu Jul 31 05:55:13 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jul 31, 2003 5:55:13 PM
Subject: Problem drytek2 2003-07-31 17:55:12: Report Problem for drytek2
Message-ID: <mailman.398.1357938285.25682.drytek2-pcs@snf.stanford.edu>

while running process 1 (O2 descum) there were many
sparkles in the plasma. I took my wafers out and ran it
without wafers. The sparkling still occurred?????
Eric saw it, too. Honest.



From cbaxter at snf.stanford.edu  Thu Jul 31 06:19:43 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Jul 31, 2003 6:19:43 PM
Subject: Problem drytek2 2003-07-31 17:55:12: Report Clear for drytek2
Message-ID: <mailman.399.1357938285.25682.drytek2-pcs@snf.stanford.edu>

run 10mins o2 plasama and rf is stable with 0 reflective.
could be by product. o2 plasma looks ok