Problem drytek2 2003-07-31 17:55:12: Report Problem for drytek2

beckwith at snf.stanford.edu beckwith at snf.stanford.edu
Thu Jul 31 05:55:13 PDT 2003


while running process 1 (O2 descum) there were many
sparkles in the plasma. I took my wafers out and ran it
without wafers. The sparkling still occurred?????
Eric saw it, too. Honest.




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