From lindaw at snf.stanford.edu Sat Jun 7 08:29:02 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jun 7, 2003 8:29:02 AM Subject: Problem drytek2 2003-06-07 08:29:01: sounds like the vac valve solenoid is leaking when system is vented Message-ID: There is a hissing noise coming from the main vacuum valve area when the valve is closed (chamber vented) Sound stops when the valve opens (chamber under vacuum). From booth at snf.stanford.edu Mon Jun 9 07:22:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 9, 2003 7:22:14 AM Subject: Problem drytek2 2003-06-07 08:29:01: Report Clear for drytek2 Message-ID: replaced bad Humphrey solenoid. From rohits at snf.stanford.edu Wed Jun 18 08:47:42 2003 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Jun 18, 2003 8:47:42 AM Subject: Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch Message-ID: I was trying to set up the CF4 etch for the new contact cleanup Process 1, 100sccm CF4, 150mTorr, 500W and had problems reducing the reflected power below 40-60W. I showed this to Len and we figured that the capacitor is reaching the end of its range. -- Rohit From mcvittie at snf.stanford.edu Wed Jun 18 09:02:05 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Wed, 18 Jun 2003 09:02:05 -0700 Subject: Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch Message-ID: <3EF08CFD.64EC3E3F@snf.stanford.edu> Rohit, It is easy to see if the cap is hitting the end of its range, the end of the white rod stops turning. It sounds like something has changed in the match network. All the std processes should be within the capture range of the matching network. RF connection problems are the usual items that throw the matching network off. Hopefully, Len will have some time to check it out. Thanks, Jim -------------- next part -------------- A non-text attachment was scrubbed... Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From sanli at snf.stanford.edu Tue Jun 24 09:02:04 2003 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jun 24, 2003 9:02:04 AM Subject: Problem drytek2 2003-06-24 09:02:03: Report Problem for drytek2 Message-ID: The gasses do not turn on although the switches are set to on. When I hit cycle start it pumps down, but does not go into the next cycle where it turns on the gasses. Also, when I turned off the standby button when I first came, the machine did not vent, I had to hit the micro-reset button to vent the chamber. From sanli at snf.stanford.edu Tue Jun 24 09:11:25 2003 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jun 24, 2003 9:11:25 AM Subject: Shutdown drytek2 2003-06-24 09:11:22: Report Shutdown for drytek2 Message-ID: System pumps down below 10 mTorr, but does not process. From booth at snf.stanford.edu Tue Jun 24 09:33:17 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 9:33:17 AM Subject: Problem drytek2 2003-06-24 09:02:03: Report Clear for drytek2 Message-ID: changed to shutdown From booth at snf.stanford.edu Tue Jun 24 09:34:26 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 24, 2003 9:34:26 AM Subject: Shutdown drytek2 2003-06-24 09:11:22: Report Clear for drytek2 Message-ID: probabably bad contacts at pressure sense circuit. Exercised adjustments, works OK again. From cbaxter at snf.stanford.edu Mon Jun 30 11:07:50 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 30, 2003 11:07:50 AM Subject: Shutdown drytek2 2003-06-30 11:07:49: Report Shutdown for drytek2 Message-ID: shutdown for routin maint From cbaxter at snf.stanford.edu Mon Jun 30 12:19:53 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 30, 2003 12:19:53 PM Subject: Shutdown drytek2 2003-06-30 11:07:49: Report Clear for drytek2 Message-ID: oil and filters changed completed