Problem drytek2 2003-06-07 08:29:01: Report Clear for drytek2
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Jun 9 07:22:14 PDT 2003
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Problem drytek2 2003-06-07 08:29:01: sounds like the vac valve solenoid is leaking when system is vented
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Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch
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replaced bad Humphrey solenoid.
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Problem drytek2 2003-06-07 08:29:01: sounds like the vac valve solenoid is leaking when system is vented
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Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch
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