Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch

rohits at snf.stanford.edu rohits at snf.stanford.edu
Wed Jun 18 08:47:42 PDT 2003


I was trying to set up the CF4 etch for the new contact cleanup
Process 1, 100sccm CF4, 150mTorr, 500W
and had problems reducing the reflected power below 40-60W. I showed this to Len and we figured that the capacitor is reaching the end of its range. 
 --
  Rohit




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