Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch
mcvittie at snf.stanford.edu
Wed Jun 18 09:02:05 PDT 2003
It is easy to see if the cap is hitting the end of its range, the end of
the white rod stops turning. It sounds like something has changed in the
match network. All the std processes should be within the capture range
of the matching network. RF connection problems are the usual items that
throw the matching network off. Hopefully, Len will have some time to
check it out.
-------------- next part --------------
A non-text attachment was scrubbed...
Size: 422 bytes
Desc: Card for Jim McVittie
More information about the drytek2-pcs