Comment drytek2 2003-06-18 08:47:42: Matching problem for CF4 etch

Jim McVittie mcvittie at snf.stanford.edu
Wed Jun 18 09:02:05 PDT 2003


Rohit,

It is easy to see if the cap is hitting the end of its range, the end of
the white rod stops turning. It sounds like something has changed in the
match network. All the std processes should be within the capture range
of the matching network. RF connection problems are the usual items that
throw the matching network off.  Hopefully, Len will have some time to
check it out.

Thanks,  Jim
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