From hopcroft at snf.stanford.edu  Sun Oct 19 08:05:13 2003
From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu)
Date: Oct 19, 2003 8:05:13 PM
Subject: Shutdown drytek2 2003-10-19 20:05:12: Report Shutdown for drytek2
Message-ID: <mailman.418.1357938285.25682.drytek2-pcs@snf.stanford.edu>

Pump valve appears to have failed. After pressing Cycle Start,  pressure gauge went blank and pump valve (audible clang) did not engage. No vacuum in chamber, blower and pump indicators went off.



From booth at snf.stanford.edu  Mon Oct 20 07:29:07 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 20, 2003 7:29:07 AM
Subject: Shutdown drytek2 2003-10-19 20:05:12: Report Clear for drytek2
Message-ID: <mailman.419.1357938285.25682.drytek2-pcs@snf.stanford.edu>

checked system - everything is working normally



From bonner at snf.stanford.edu  Mon Oct 20 09:21:37 2003
From: bonner at snf.stanford.edu (bonner at snf.stanford.edu)
Date: Oct 20, 2003 9:21:37 AM
Subject: Problem drytek2 2003-10-20 09:21:36: Report Problem for drytek2
Message-ID: <mailman.420.1357938285.25682.drytek2-pcs@snf.stanford.edu>

The pressure regulator does not seem to function during processing ... (pressure does not match or respond to set-point).  Additionally, the etch rate measured in the bottom most patten is about 1/100 - 1/1000 that of the four just above.



From lindaw at snf.stanford.edu  Mon Oct 20 09:49:44 2003
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Oct 20, 2003 9:49:44 AM
Subject: Comment drytek2 2003-10-20 09:49:43: 10/20/03 9:45 am seems to be working normally
Message-ID: <mailman.421.1357938285.25682.drytek2-pcs@snf.stanford.edu>

No problems with pressure control as previously reported.



From booth at snf.stanford.edu  Mon Oct 20 09:51:59 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Oct 20, 2003 9:51:59 AM
Subject: Problem drytek2 2003-10-20 09:21:36: Report Clear for drytek2
Message-ID: <mailman.422.1357938285.25682.drytek2-pcs@snf.stanford.edu>

machine is currently working normally.
Linda W. confirmed this just now.



From cbaxter at snf.stanford.edu  Thu Oct 30 17:26:30 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 30 Oct 2003 17:26:30 -0800
Subject: Shutdown drytek2 2003-10-30 17:26:29: routin maint
Message-ID: <mailman.423.1357938285.25682.drytek2-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Thu Oct 30 17:58:33 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Thu, 30 Oct 2003 17:58:33 -0800
Subject: Shutdown drytek2 2003-10-30 17:26:29: routin maint
Message-ID: <mailman.424.1357938285.25682.drytek2-pcs@snf.stanford.edu>

completed oil,filters and demister changed