Problem drytek2 2003-10-20 09:21:36: Report Problem for drytek2

bonner at snf.stanford.edu bonner at snf.stanford.edu
Mon Oct 20 09:21:37 PDT 2003


The pressure regulator does not seem to function during processing ... (pressure does not match or respond to set-point).  Additionally, the etch rate measured in the bottom most patten is about 1/100 - 1/1000 that of the four just above.




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