From yeh at snf.stanford.edu Tue Aug 3 11:35:42 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:35:42 -0700 Subject: Problem drytek2 SNF 2004-08-03 11:35:42: flow gauge 2 problem Message-ID: may be a problem witH FLOW gauge 2 (SF6). it constantly reads 15 sccm. From eenriquez at snf.stanford.edu Tue Aug 3 14:03:30 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Aug 2004 14:03:30 -0700 Subject: Problem drytek2 SNF 2004-08-03 11:35:42: flow gauge 2 problem Message-ID: pumped out the SF6 gas line to the shut-off valve and zeroed the MFC. From yeh at snf.stanford.edu Tue Aug 3 19:24:11 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Tue, 3 Aug 2004 19:24:11 -0700 Subject: Shutdown drytek2 SNF 2004-08-03 19:24:10: sorry! contaminated Message-ID: Sorry all! ashed a sample today which may have been Au contaminated. Sorry. From cbaxter at snf.stanford.edu Tue Aug 3 19:36:37 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 3 Aug 2004 19:36:37 -0700 Subject: Shutdown drytek2 SNF 2004-08-03 19:24:10: sorry! contaminated Message-ID: From eenriquez at snf.stanford.edu Wed Aug 4 15:55:24 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Aug 2004 15:55:24 -0700 Subject: Comment drytek2 SNF 2004-08-04 15:55:23: Wet cleaned chamber Message-ID: Wet cleaned chamber after wafer containing gold was processed through the system. From cbaxter at snf.stanford.edu Wed Aug 4 19:52:15 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Aug 2004 19:52:15 -0700 Subject: Shutdown drytek2 SNF 2004-08-04 19:52:14: routin maint. Message-ID: From cbaxter at snf.stanford.edu Wed Aug 4 21:11:58 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Aug 2004 21:11:58 -0700 Subject: Shutdown drytek2 SNF 2004-08-04 19:52:14: routin maint. Message-ID: completed oil changed and filters. From barlian at snf.stanford.edu Mon Aug 9 01:17:51 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Mon, 9 Aug 2004 01:17:51 -0700 Subject: Problem drytek2 SNF 2004-08-09 01:17:51: the "cycle start" button is stucked Message-ID: I haven't used it.. I noticed that they "cycle start" is stucked and could not pop out From cbaxter at snf.stanford.edu Mon Aug 9 12:31:43 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2004 12:31:43 -0700 Subject: Problem drytek2 SNF 2004-08-09 01:17:51: the "cycle start" button is stucked Message-ID: push button bracket came off lose. secure bracket. From kenney at snf.stanford.edu Tue Aug 10 12:20:17 2004 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Tue, 10 Aug 2004 12:20:17 -0700 Subject: Problem drytek2 SNF 2004-08-10 12:20:16: Cycle Start Button Sticking Message-ID: The cycle start button is sticking again. It went off on its own while I was loading a wafer and started pumping with the door open. From cbaxter at snf.stanford.edu Tue Aug 10 12:59:32 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Aug 2004 12:59:32 -0700 Subject: Problem drytek2 SNF 2004-08-10 12:20:16: Cycle Start Button Sticking Message-ID: removed locking bracket and tie wrap momentary switch. From mislam at snf.stanford.edu Wed Aug 11 08:10:13 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 11 Aug 2004 08:10:13 -0700 Subject: Problem drytek2 SNF 2004-08-11 08:10:12: "Cycle Start" button stuck Message-ID: From eenriquez at snf.stanford.edu Wed Aug 11 09:16:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 11 Aug 2004 09:16:41 -0700 Subject: Comment drytek2 SNF 2004-08-04 15:55:23: Wet cleaned chamber Message-ID: ok From cbaxter at snf.stanford.edu Wed Aug 11 16:32:33 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Aug 2004 16:32:33 -0700 Subject: Shutdown drytek2 SNF 2004-08-11 16:32:32: bad cycled start momentary switch Message-ID: From cbaxter at snf.stanford.edu Wed Aug 11 17:15:32 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Aug 2004 17:15:32 -0700 Subject: Shutdown drytek2 SNF 2004-08-11 16:32:32: bad cycled start momentary switch Message-ID: changed momentary switch. From cbaxter at snf.stanford.edu Wed Aug 11 17:15:52 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Aug 2004 17:15:52 -0700 Subject: Problem drytek2 SNF 2004-08-11 08:10:12: "Cycle Start" button stuck Message-ID: changed momentary switch From barlian at snf.stanford.edu Thu Aug 12 07:52:44 2004 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Thu, 12 Aug 2004 07:52:44 -0700 Subject: Comment drytek2 SNF 2004-08-12 07:52:44: Message-ID: I'm not sure if this is a problem or not. The "deviation" light on the controller #4 (on the front panel) is red, unlike the other 3. From me342d at snf.stanford.edu Sun Aug 15 19:57:14 2004 From: me342d at snf.stanford.edu (me342d at snf.stanford.edu) Date: Sun, 15 Aug 2004 19:57:14 -0700 Subject: Problem drytek2 SNF 2004-08-15 19:57:13: Drytek2 Down Message-ID: The mechanical pump button and the blower button were not on. From eenriquez at snf.stanford.edu Mon Aug 16 08:39:43 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2004 08:39:43 -0700 Subject: Problem drytek2 SNF 2004-08-15 19:57:13: Drytek2 Down Message-ID: No problem found. Mechanical pump and blower were already on. From yeh at snf.stanford.edu Mon Aug 16 08:50:34 2004 From: yeh at snf.stanford.edu (yeh at snf.stanford.edu) Date: Mon, 16 Aug 2004 08:50:34 -0700 Subject: Problem drytek2 SNF 2004-08-16 08:50:34: arcing in lower 3 platforms Message-ID: seen during process 1 (descum) From eenriquez at snf.stanford.edu Mon Aug 16 14:46:51 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2004 14:46:51 -0700 Subject: Problem drytek2 SNF 2004-08-16 08:50:34: arcing in lower 3 platforms Message-ID: Ran an O2 plasma clean for 75 min. 30 min. @ 250mT and 45 min. @ 50 mT. From qwang at snf.stanford.edu Tue Aug 17 11:53:07 2004 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Tue, 17 Aug 2004 11:53:07 -0700 Subject: Problem drytek2 SNF 2004-08-17 11:53:06: The button of "cycle start" not work Message-ID: From eenriquez at snf.stanford.edu Tue Aug 17 16:33:18 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Aug 2004 16:33:18 -0700 Subject: Problem drytek2 SNF 2004-08-17 11:53:06: The button of "cycle start" not work Message-ID: Repaired cycle start switch From kwang at snf.stanford.edu Tue Aug 17 17:44:01 2004 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Tue, 17 Aug 2004 17:44:01 -0700 Subject: Problem drytek2 SNF 2004-08-17 17:44:01: standby pressure problem Message-ID: Once I disable the machine, the pressure can't hold at 250mtorr any more, it keeps doing the pump down cycle. I had to keep it enabled... From kwang at snf.stanford.edu Tue Aug 17 17:52:58 2004 From: kwang at snf.stanford.edu (kwang at snf.stanford.edu) Date: Tue, 17 Aug 2004 17:52:58 -0700 Subject: Comment drytek2 SNF 2004-08-17 17:52:58: it's fine now Message-ID: I ran the machine again and could put it back to standby. From cbaxter at snf.stanford.edu Tue Aug 17 19:42:50 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Aug 2004 19:42:50 -0700 Subject: Problem drytek2 SNF 2004-08-17 17:44:01: standby pressure problem Message-ID: