Problem drytek2 SNF 2004-08-10 12:20:16: Cycle Start Button Sticking

kenney at snf.stanford.edu kenney at snf.stanford.edu
Tue Aug 10 12:20:17 PDT 2004


The cycle start button is sticking again. It went off on its
own while I was loading a wafer and started pumping
with the door open.




More information about the drytek2-pcs mailing list