Problem drytek2 SNF 2004-08-17 17:44:01: standby pressure problem

kwang at snf.stanford.edu kwang at snf.stanford.edu
Tue Aug 17 17:44:01 PDT 2004


Once I disable the machine, the pressure can't hold at 250mtorr any more, it keeps doing the pump down cycle. I had to keep it enabled...




More information about the drytek2-pcs mailing list