Problem drytek2 SNF 2004-08-17 17:44:01: standby pressure problem
kwang at snf.stanford.edu
kwang at snf.stanford.edu
Tue Aug 17 17:44:01 PDT 2004
Once I disable the machine, the pressure can't hold at 250mtorr any more, it keeps doing the pump down cycle. I had to keep it enabled...
More information about the drytek2-pcs
mailing list