Problem drytek2 2004-01-27 18:35:20: Photoresist etches very fast in nitride recipe
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jan 27 22:29:50 PST 2004
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Problem drytek2 2004-01-27 18:35:20: Photoresist etches very fast in nitride recipe
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Shutdown drytek2 2004-01-28 10:39:31: Suspect a leak
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Problem drytek2 2004-01-27 18:35:20: Photoresist etches very fast in nitride recipe
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Shutdown drytek2 2004-01-28 10:39:31: Suspect a leak
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