Comment drytek2 2004-01-26 10:01:37: Platen pins are getting really short
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Tue Jan 27 22:53:08 PST 2004
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Comment drytek2 2004-01-26 10:01:37: Platen pins are getting really short
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Problem drytek2 2004-01-27 18:35:20: Photoresist etches very fast in nitride recipe
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changed all teflon pins
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Comment drytek2 2004-01-26 10:01:37: Platen pins are getting really short
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Problem drytek2 2004-01-27 18:35:20: Photoresist etches very fast in nitride recipe
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