Shutdown drytek2 2004-01-28 10:39:31: Suspect a leak

mcvittie at snf.stanford.edu mcvittie at snf.stanford.edu
Wed Jan 28 11:56:22 PST 2004


Leak rate < 5 MT/MIN. No problem found with pressure control. Run both SF6 and O2 plasmas. Everything looked fine. Suggest  we run process tests. Maybe problem will show up then.
	Jim




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