Shutdown drytek2 2004-01-28 10:39:31: Suspect a leak

mcvittie at mcvittie at
Wed Jan 28 11:56:22 PST 2004

Leak rate < 5 MT/MIN. No problem found with pressure control. Run both SF6 and O2 plasmas. Everything looked fine. Suggest  we run process tests. Maybe problem will show up then.

More information about the drytek2-pcs mailing list