Problem drytek2 SNF 2004-07-29 19:22:31: Relatively high etch rate

jenwang at snf.stanford.edu jenwang at snf.stanford.edu
Thu Jul 29 19:22:31 PDT 2004


The etch rate at the second plate from the top is much higher than the other plates.  The poly etch rate is 2600A/min but not 1600A/min in the process "poly etch"




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