Comment drytek2 SNF 2004-07-30 08:48:07: High etch rate

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Jul 30 08:48:13 PDT 2004


Ran an O2 clean for 45 min.  Noticed the 2nd had less sparkles during the plasma clean.  Nancy will check out the etch rate.




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