Problem drytek2 SNF 2004-07-29 19:22:31: Relatively high etch rate

latta at snf.stanford.edu latta at snf.stanford.edu
Fri Jul 30 15:02:23 PDT 2004


Ran an electrode-to-electrode test; Poly program (117 SF6, 51 F22, 150mT, 400W) for 00:02:00.  Results;
Electrode #      Etch Rate/min
1                           1766
2                           1850
3                           1704
4                           1552
5                           1506
6                           1796
Average of the electrodes is 1696A/min, not too far off of the 2003 data.
Did not experience the high etchrate the user did.  Will talk to them about their wafers.




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