Problem drytek2 SNF 2004-06-22 12:52:16: flow controller for SF6 is drifting

crichter at snf.stanford.edu crichter at snf.stanford.edu
Tue Jun 22 12:52:17 PDT 2004


process was run with Whitey valve closed to see if the controller would go down to zero....its still at 10sccm.




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