From eenriquez at snf.stanford.edu  Mon Mar  1 09:50:43 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 1 Mar 2004 09:50:43 -0800
Subject: Comment drytek2 2004-02-06 15:44:53: reflected pwr high
Message-ID: <mailman.450.1357938286.25682.drytek2-pcs@snf.stanford.edu>

Cleaned chamber. Ran recipe 1 for 30 min. no problems.



From eenriquez at snf.stanford.edu  Mon Mar  1 09:51:27 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Mon, 1 Mar 2004 09:51:27 -0800
Subject: Problem drytek2 2004-02-29 10:19:39: Plasma unstable
Message-ID: <mailman.451.1357938286.25682.drytek2-pcs@snf.stanford.edu>

Cleaned chamber. Ran recipe 2, no problems



From kenney at snf.stanford.edu  Mon Mar  1 15:01:04 2004
From: kenney at snf.stanford.edu (kenney at snf.stanford.edu)
Date: Mon, 1 Mar 2004 15:01:04 -0800
Subject: Problem drytek2 2004-03-01 15:01:03: Plate 3, plasma deignites 
Message-ID: <mailman.452.1357938286.25682.drytek2-pcs@snf.stanford.edu>




From rfasch at snf.stanford.edu  Mon Mar  1 17:09:33 2004
From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu)
Date: Mon, 1 Mar 2004 17:09:33 -0800
Subject: Problem drytek2 2004-03-01 17:09:32: arcing
Message-ID: <mailman.453.1357938286.25682.drytek2-pcs@snf.stanford.edu>

all stages show plasma- but had arcing in O2 plasma --dirty chamber-  run a long O2 clean.



From cbaxter at snf.stanford.edu  Mon Mar  1 18:58:57 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 1 Mar 2004 18:58:57 -0800
Subject: Problem drytek2 2004-03-01 17:09:32: arcing
Message-ID: <mailman.454.1357938286.25682.drytek2-pcs@snf.stanford.edu>

run 30 mins o2 clean



From cbaxter at snf.stanford.edu  Mon Mar  1 19:00:59 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 1 Mar 2004 19:00:59 -0800
Subject: Problem drytek2 2004-03-01 15:01:03: Plate 3, plasma deignites 
Message-ID: <mailman.455.1357938286.25682.drytek2-pcs@snf.stanford.edu>

plasma is stable with o2 clean



From yiching at snf.stanford.edu  Mon Mar  1 19:28:17 2004
From: yiching at snf.stanford.edu (yiching at snf.stanford.edu)
Date: Mon, 1 Mar 2004 19:28:17 -0800
Subject: Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
Message-ID: <mailman.456.1357938286.25682.drytek2-pcs@snf.stanford.edu>

Recipe:
SF6=53
F13=33
pressure=200mTorr
RF=500W
photoresist etches at ~650A/min, should be lower (450A/min)



From cbaxter at snf.stanford.edu  Mon Mar  1 20:55:10 2004
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mon, 1 Mar 2004 20:55:10 -0800
Subject: Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
Message-ID: <mailman.457.1357938286.25682.drytek2-pcs@snf.stanford.edu>




From kenney at snf.stanford.edu  Tue Mar  2 11:47:05 2004
From: kenney at snf.stanford.edu (kenney at snf.stanford.edu)
Date: Tue, 2 Mar 2004 11:47:05 -0800
Subject: Shutdown drytek2 2004-03-02 11:47:05: Lost plasma, screws glow orange!
Message-ID: <mailman.458.1357938286.25682.drytek2-pcs@snf.stanford.edu>

I ran a poly etch for about 20:00 and everything was perfect.
I started a second poly etch and after about 3:00 the
RF tuning became unstable. Within a minute I lost the plasma
completely. I removed my wafers and started an O2 descum.
There was no plasma and I noticed within seconds that
the screws in the from of each plate with white rectangular
insulators were glowing ORANGE! I shut the machine
down as quickly as I could.



From eenriquez at snf.stanford.edu  Tue Mar  2 15:27:47 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Tue, 2 Mar 2004 15:27:47 -0800
Subject: Shutdown drytek2 2004-03-02 11:47:05: Lost plasma, screws glow orange!
Message-ID: <mailman.459.1357938286.25682.drytek2-pcs@snf.stanford.edu>

Ran O2 plasma for 50 minutes.