Problem drytek2 2004-02-29 10:19:39: Plasma unstable
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Mar 1 09:51:27 PST 2004
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Comment drytek2 2004-02-06 15:44:53: reflected pwr high
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Problem drytek2 2004-03-01 15:01:03: Plate 3, plasma deignites
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Cleaned chamber. Ran recipe 2, no problems
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Comment drytek2 2004-02-06 15:44:53: reflected pwr high
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Problem drytek2 2004-03-01 15:01:03: Plate 3, plasma deignites
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