Problem drytek2 2004-03-01 17:09:32: arcing
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Mar 1 18:58:57 PST 2004
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Problem drytek2 2004-03-01 17:09:32: arcing
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Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
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run 30 mins o2 clean
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Problem drytek2 2004-03-01 17:09:32: arcing
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Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
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