Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program

yiching at snf.stanford.edu yiching at snf.stanford.edu
Mon Mar 1 19:28:17 PST 2004


Recipe:
SF6=53
F13=33
pressure=200mTorr
RF=500W
photoresist etches at ~650A/min, should be lower (450A/min)




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