Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Mon Mar 1 20:55:10 PST 2004
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Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
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Shutdown drytek2 2004-03-02 11:47:05: Lost plasma, screws glow orange!
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Problem drytek2 2004-03-01 19:28:15: photoresist etches very fast in standard nitride program
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Shutdown drytek2 2004-03-02 11:47:05: Lost plasma, screws glow orange!
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