Problem drytek2 SNF 2004-11-14 21:02:46: no RF on process 2

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Nov 15 23:42:54 PST 2004


process2 is ok. ran O2 plasma at 500watts rf power
and manually tuned match to 0 reflective.




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