From rwoo at snf.stanford.edu Sun Apr 3 15:32:47 2005 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sun, 3 Apr 2005 15:32:47 -0700 Subject: Problem drytek2 SNF 2005-04-03 15:32:46: broken wafer piece Message-ID: broken piece in 2nd slot from top - not sure who it belongs to From eenriquez at snf.stanford.edu Mon Apr 4 08:56:45 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 4 Apr 2005 08:56:45 -0700 Subject: Problem drytek2 SNF 2005-04-03 15:32:46: broken wafer piece Message-ID: Someone already cleaned up the broken wafer pieces. Ran an O2 clean for 15 mins. From king at snf.stanford.edu Wed Apr 13 20:37:36 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Wed, 13 Apr 2005 20:37:36 -0700 Subject: Problem drytek2 SNF 2005-04-13 20:37:36: DRYTEK2 process2 not tuning. Message-ID: used Process 3 which is slightly better but not great. Another user couldn't do it either. From cbaxter at snf.stanford.edu Thu Apr 14 00:38:08 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 14 Apr 2005 00:38:08 -0700 Subject: Problem drytek2 SNF 2005-04-13 20:37:36: DRYTEK2 process2 not tuning. Message-ID: manually process#2 with o2 gas without a problem. From mislam at snf.stanford.edu Mon Apr 18 09:44:39 2005 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 18 Apr 2005 09:44:39 -0700 Subject: Problem drytek2 SNF 2005-04-18 09:44:38: Freon-13 flow low, won't adjust Message-ID: From ratiug at snf.stanford.edu Mon Apr 18 10:55:13 2005 From: ratiug at snf.stanford.edu (ratiug at snf.stanford.edu) Date: Mon, 18 Apr 2005 10:55:13 -0700 Subject: Problem drytek2 SNF 2005-04-18 10:55:13: F13 can;t be turn up to 33sccm Message-ID: it seems F13 is run out. From eenriquez at snf.stanford.edu Mon Apr 18 12:51:02 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Apr 2005 12:51:02 -0700 Subject: Problem drytek2 SNF 2005-04-18 10:55:13: F13 can;t be turn up to 33sccm Message-ID: The gas cylinder is empty. The manufacturer has stopped selling this product. From eenriquez at snf.stanford.edu Mon Apr 18 12:51:31 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 18 Apr 2005 12:51:31 -0700 Subject: Problem drytek2 SNF 2005-04-18 09:44:38: Freon-13 flow low, won't adjust Message-ID: The gas cylinder is empty. The manufacturer has stopped selling this product. From king at snf.stanford.edu Thu Apr 21 19:06:32 2005 From: king at snf.stanford.edu (king at snf.stanford.edu) Date: Thu, 21 Apr 2005 19:06:32 -0700 Subject: Problem drytek2 SNF 2005-04-21 19:06:32: Drytek2- no F13B1 Message-ID: It appears to be out. Also, the last person to use it closed the round valve very hard (and possibly smashed the needle valve). From seoung at snf.stanford.edu Thu Apr 21 20:59:28 2005 From: seoung at snf.stanford.edu (seoung at snf.stanford.edu) Date: Thu, 21 Apr 2005 20:59:28 -0700 Subject: Problem drytek2 SNF 2005-04-21 20:59:27: No F13 and Rev. RF power Message-ID: It seems like it ran out of F13. It's hard to decrease the reflected power below 60W in case of process 3. From cbaxter at snf.stanford.edu Thu Apr 21 21:28:41 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Apr 2005 21:28:41 -0700 Subject: Comment drytek2 SNF 2005-04-21 21:28:41: f13 is no longer avail. Message-ID: From cbaxter at snf.stanford.edu Thu Apr 21 21:29:44 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Apr 2005 21:29:44 -0700 Subject: Problem drytek2 SNF 2005-04-21 20:59:27: No F13 and Rev. RF power Message-ID: f13 is no longer avail From cbaxter at snf.stanford.edu Thu Apr 21 21:29:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 21 Apr 2005 21:29:52 -0700 Subject: Problem drytek2 SNF 2005-04-21 19:06:32: Drytek2- no F13B1 Message-ID: