Problem drytek2 SNF 2005-04-21 20:59:27: No F13 and Rev. RF power

seoung at snf.stanford.edu seoung at snf.stanford.edu
Thu Apr 21 20:59:28 PDT 2005


It seems like it ran out of F13.
It's hard to decrease the reflected power below 60W in case of process 3.




More information about the drytek2-pcs mailing list