From elvislin at snf.stanford.edu Wed Aug 3 18:55:34 2005 From: elvislin at snf.stanford.edu (elvislin at snf.stanford.edu) Date: Wed, 3 Aug 2005 18:55:34 -0700 Subject: Problem drytek2 SNF 2005-08-03 18:55:34: "TIMER 2" goes wrong while setting to 08:00 Message-ID: The machine will take as zero process time while setting the TIMER 2 at "08:00". it means it'll end the process soon after it pump down. From cbaxter at snf.stanford.edu Wed Aug 3 23:45:19 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 3 Aug 2005 23:45:19 -0700 Subject: Problem drytek2 SNF 2005-08-03 18:55:34: "TIMER 2" goes wrong while setting to 08:00 Message-ID: timer thumbwheel was not set right. run a recipe without a problem. From panjun at snf.stanford.edu Mon Aug 8 10:40:35 2005 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Mon, 8 Aug 2005 10:40:35 -0700 Subject: Comment drytek2 SNF 2005-08-08 10:40:34: system button off Message-ID: system button in the lower left is off, when I check the standby condition. I didn't proceed. From panjun at snf.stanford.edu Mon Aug 8 10:42:30 2005 From: panjun at snf.stanford.edu (panjun at snf.stanford.edu) Date: Mon, 8 Aug 2005 10:42:30 -0700 Subject: Problem drytek2 SNF 2005-08-08 10:42:27: system button off Message-ID: The system button in the lower left is off, when I check the standby condition. So I didn't proceed. From eenriquez at snf.stanford.edu Mon Aug 8 11:56:52 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Aug 2005 11:56:52 -0700 Subject: Problem drytek2 SNF 2005-08-08 10:42:27: system button off Message-ID: replaced burnt out bulb From eenriquez at snf.stanford.edu Mon Aug 8 11:57:00 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 8 Aug 2005 11:57:00 -0700 Subject: Comment drytek2 SNF 2005-08-08 10:40:34: system button off Message-ID: replaced burnt out bulb From eata at snf.stanford.edu Wed Aug 10 21:45:24 2005 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Wed, 10 Aug 2005 21:45:24 -0700 Subject: Problem drytek2 SNF 2005-08-10 21:45:24: was not left in standby. Message-ID: Chamber was not under vacuum From cbaxter at snf.stanford.edu Wed Aug 10 22:06:10 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 10 Aug 2005 22:06:10 -0700 Subject: Problem drytek2 SNF 2005-08-10 21:45:24: was not left in standby. Message-ID: put system on stand by. From eata at snf.stanford.edu Mon Aug 15 19:03:19 2005 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Mon, 15 Aug 2005 19:03:19 -0700 Subject: Problem drytek2 SNF 2005-08-15 19:03:18: process 3 timer does not work properly Message-ID: Etch does not stop at the set time. Micro reset button seems to work properly but maybe does not reset time properly, or there's an issue with the thumb wheels. From eata at snf.stanford.edu Mon Aug 15 19:19:01 2005 From: eata at snf.stanford.edu (eata at snf.stanford.edu) Date: Mon, 15 Aug 2005 19:19:01 -0700 Subject: Comment drytek2 SNF 2005-08-15 19:19:00: My bad, switch toggled to Laser by mistake. Message-ID: From cbaxter at snf.stanford.edu Mon Aug 15 21:11:48 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Aug 2005 21:11:48 -0700 Subject: Problem drytek2 SNF 2005-08-15 19:03:18: process 3 timer does not work properly Message-ID: run a 5mins o2 etch without a problem. From cbaxter at snf.stanford.edu Mon Aug 15 21:12:05 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Aug 2005 21:12:05 -0700 Subject: Comment drytek2 SNF 2005-08-15 19:19:00: My bad, switch toggled to Laser by mistake. Message-ID: From cbaxter at snf.stanford.edu Mon Aug 22 17:19:29 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Aug 2005 17:19:29 -0700 Subject: Shutdown drytek2 SNF 2005-08-22 17:19:28: flushing electrode cooling line Message-ID: From cbaxter at snf.stanford.edu Mon Aug 22 23:27:00 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 22 Aug 2005 23:27:00 -0700 Subject: Shutdown drytek2 SNF 2005-08-22 17:19:28: flushing electrode cooling line Message-ID: Flushed cooling line and changed electrode chiller.