From aokyay at snf.stanford.edu Thu Dec 1 01:07:48 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Thu, 1 Dec 2005 01:07:48 -0800 Subject: Problem drytek2 SNF 2005-12-01 01:07:47: Mechanical pump and blower buttons off Message-ID: From eenriquez at snf.stanford.edu Thu Dec 1 08:50:06 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 1 Dec 2005 08:50:06 -0800 Subject: Problem drytek2 SNF 2005-12-01 01:07:47: Mechanical pump and blower buttons off Message-ID: Replaced burnt out indicator lights From aokyay at snf.stanford.edu Sat Dec 3 12:07:47 2005 From: aokyay at snf.stanford.edu (aokyay at snf.stanford.edu) Date: Sat, 3 Dec 2005 12:07:47 -0800 Subject: Problem drytek2 SNF 2005-12-03 12:07:46: cannot bring the ref power down Message-ID: pots seem not to operate From lindaw at snf.stanford.edu Mon Dec 5 11:03:10 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 5 Dec 2005 11:03:10 -0800 Subject: Comment drytek2 SNF 2005-12-05 11:03:09: ran O2 descum and poly program no problems Message-ID: The pot settings were way off for both process 1 & 2. I reset thecap and coil to values I had recorded in my lab book. Ran O2 descum and poly etch with 0-20 refelcted power. Looks fine to me. From eenriquez at snf.stanford.edu Mon Dec 5 11:10:01 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 5 Dec 2005 11:10:01 -0800 Subject: Problem drytek2 SNF 2005-12-03 12:07:46: cannot bring the ref power down Message-ID: RF tune was way out. Lindaw adjusted tuning From pethe at snf.stanford.edu Sat Dec 10 06:40:53 2005 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Sat, 10 Dec 2005 06:40:53 -0800 Subject: Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber Message-ID: I was trying to run a desum propcess in the chamber, Process 1-O2-100-Pressure-150mT-Power-500W. Noticed sparking near the plastic pins. Shut down the plasma immediately. From lindaw at snf.stanford.edu Sat Dec 10 08:11:49 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 10 Dec 2005 08:11:49 -0800 Subject: Comment drytek2 SNF 2005-12-10 08:11:48: ran 2 min Poly etch, no sparks. looks normal Message-ID: I ran 3 runs (2 min each) of the poly etch program 2, did not notice anything unusual with the plasma. From lindaw at snf.stanford.edu Sat Dec 10 14:04:19 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 10 Dec 2005 14:04:19 -0800 Subject: Comment drytek2 SNF 2005-12-10 14:04:18: ran O2 plasma, looks normal, no "sparks" Message-ID: From lindaw at snf.stanford.edu Sat Dec 10 14:17:49 2005 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 10 Dec 2005 14:17:49 -0800 Subject: Problem drytek2 SNF 2005-12-10 14:17:48: ok, now the pressure won't adjust during run Message-ID: The position gage is pegged out at 100, as if the valve is stuck open. process pressure for o2 descum stuck at 56, process pressure for poly etch stuck at 107mT. From gaurav558 at snf.stanford.edu Sat Dec 10 15:29:02 2005 From: gaurav558 at snf.stanford.edu (gaurav558 at snf.stanford.edu) Date: Sat, 10 Dec 2005 15:29:02 -0800 Subject: Problem drytek2 SNF 2005-12-10 15:29:02: problem in increasing pressure Message-ID: Pressure in machine is not increasing.....It is fixed at 50mT From mcvittie at snf.stanford.edu Mon Dec 12 09:29:20 2005 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Mon, 12 Dec 2005 09:29:20 -0800 Subject: Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber Message-ID: <439DB370.480606F8@snf.stanford.edu> Abhijit, A low level of "sparking" has often been seen over the past 20 years for Dryteks when run running O2 plasma. By low level, I mean small flashes of light emitted randomly from around the electrode stack. I believe it is worst at higher pressures. I was never been able to track it down to a specific problem. I suscept it is caused by a local breakdown of the plasma sheath. Perhaps, it is due to electrode surface roughness from deposition. It does not appear appear to cause any problems. Jim From cbaxter at snf.stanford.edu Mon Dec 12 11:01:26 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:01:26 -0800 Subject: Problem drytek2 SNF 2005-12-10 15:29:02: problem in increasing pressure Message-ID: its working, did not make any adjustment From cbaxter at snf.stanford.edu Mon Dec 12 11:01:33 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:01:33 -0800 Subject: Problem drytek2 SNF 2005-12-10 14:17:48: ok, now the pressure won't adjust during run Message-ID: From cbaxter at snf.stanford.edu Mon Dec 12 11:01:39 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:01:39 -0800 Subject: Comment drytek2 SNF 2005-12-10 14:04:18: ran O2 plasma, looks normal, no "sparks" Message-ID: From cbaxter at snf.stanford.edu Mon Dec 12 11:01:44 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:01:44 -0800 Subject: Comment drytek2 SNF 2005-12-10 08:11:48: ran 2 min Poly etch, no sparks. looks normal Message-ID: From cbaxter at snf.stanford.edu Mon Dec 12 11:01:52 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:01:52 -0800 Subject: Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber Message-ID: From cbaxter at snf.stanford.edu Mon Dec 12 11:02:00 2005 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2005 11:02:00 -0800 Subject: Comment drytek2 SNF 2005-12-05 11:03:09: ran O2 descum and poly program no problems Message-ID: From eenriquez at snf.stanford.edu Tue Dec 13 23:19:59 2005 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 13 Dec 2005 23:19:59 -0800 Subject: Comment drytek2 SNF 2005-12-13 23:19:58: Changed oil Message-ID: