Comment drytek2 SNF 2005-12-05 11:03:09: ran O2 descum and poly program no problems
lindaw at snf.stanford.edu
lindaw at snf.stanford.edu
Mon Dec 5 11:03:10 PST 2005
The pot settings were way off for both process 1 & 2. I reset thecap and coil to values I had recorded in my lab book. Ran O2 descum and poly etch with 0-20 refelcted power. Looks fine to me.
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