Problem drytek2 SNF 2005-12-10 06:40:52: Sparks in the chamber

pethe at snf.stanford.edu pethe at snf.stanford.edu
Sat Dec 10 06:40:53 PST 2005


I was trying to run a desum propcess in the chamber, Process 1-O2-100-Pressure-150mT-Power-500W. Noticed sparking near the plastic pins. Shut down the plasma immediately. 




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